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onchip coupling capacitors in 0.13um technology

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sureshnaidu

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Iam using a onchip capacitance of 50pF as a coupling capacitance.a 100umX100um giving 10pF capacitance.iam using five capacitos of 10pF each in parallel.can i place these capacitors one over the other.if it is so maximum how many capacitors placed one over other.iam using 0.13um technology.pls explain.thanks in advance
 

If your process has N metal layers, you can stack N-1 capacitors. If possible, don't use M1 (largest parasitic capacitance to substrate).
 

In a 0.13um process are the caps MIM caps? If so, you can NOT stack them..... Or are you making your own hand calculated caps with metal layers? what type of caps do you have available? also there are different MIM caps with different area/fF, What do you have?

jgk
 

In a 0.13um process are the caps MIM caps? If so, you can NOT stack them
With a 1fF/(µm)² cap value I suppose it's a MOM cap. They can be stacked.
 

a MIM cap is not the same as a MOM cap. In 90nm TSMC you had to pay extra for the MOM caps. You are correct the MOM caps can be stacked but the MIM caps you can not because they are in between layers, usallys met 6 to met 8. Also the MIM caps come in two flavors, 1fF/um2 and 2fF/um2... well atleast in 90nm

Jgk
 

are you making your own hand calculated caps with metal layers? what type of caps do you have available?

jgk

Iam not making capacitors usng metal layers.Iam using the MIM capacitors from the umc0.13um technology library.MIM,MOM,N-CAP,P-CAP are available in the library.which is best to use for coupling purpose in terms of area and other advantages if any.thanks in advance
 

You need to check with whomever will be making your chip! Like I said above, I am sure you pay extra for the MOM caps. Is your company, professor, or department willing to pay for the extra stuff or do you get the default. (If you are a mini ASIC run you have to do what everone else is doing... So you don't have a choice, just find out what you can and can not use. You need to check with whomever is making your chip to see what you have available. It is in your PDK docs or your boss will know. If this is just a project for school which will not be manufactured just use the MIM caps.

Jgk
 

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