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Change of width and lengh during fabrication

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vijaysunil

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May i know what % of variation could be expected while a device is fabricated.
eg. say i designed a CMOS device with W/L as 100um/1um. Can i expect a variation of about 10% in the fabricated device dimensions i.e. effective W/L becomes 90/0.9 OR is the % variation lesser than this.

Thanks a lot in advance!!
Vijay
 

Check the process specification - it will be in there. It won't be a percentage - it will be an absolute value. It will be different for width & length.

Keith
 

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