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Check the paper : " A 10-bit 100-MS/s Reference-Free SAR ADC in 90 nm CMOS "
A table with some of the latest FOMs (fJ/step) is in the last page. Worthwhile.
Also check the paper "A 90MS/s 11MHz Bandwidth 62dB SNDR Noise-Shaping SAR ADC" by Jeffrey Fredenburg and Michael Flynn from ISSCC 2012. Very interesting.
Finally, "Low power 12bit 50KS/s R-C SAR ADC Implemented based on Mismatch Analysis" contains a FOM table (pJ/c) at the end as well. It is from 2011.
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