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any book talks about fabrication and device characteristic?

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mdcui

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I am looking for some knowledge for the relation between silicon fabrication process and device characteristics, like how oxide thickness or diffusion doping density will affect Vt, is there any good books that you can recommend?

thanks very much...
 

Try with Baker-Boyce-Li's "CMOS Circuit Design, Layout and Simulation". A really good IEEE book.
 

Re: any book talks about fabrication and device characterist

allan hastings
can ask to me if required
 

thanks guys, and actually I am trying to find out how fabrication process is impacting devices, there is not much books talks about that...
 

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