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Non-linear Poly-2 Resistor in CMOS 0.35um VIS(Vanguard-TSMC)

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shakeel_qureshi

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We recently did some designs with CMOS 0.35um VIS (Vanguard-TSMC) process. The poly-2 resistors came out very non-linear with 10-100x variations from the design values. We used ICartis for this wafer run.

We are suspecting that we made a change in the poly-2 resistors from 50ohm/sq to 2kohm/sq in the design kit as intructed by ICartis. Not sure, if this could be the issue or simply the run was bad. Although, VIS (vanguard) did test their own test resistors which came good.

Has anyone seen something like this before.

Thanks,
Shakeel
 

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