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Vth0 increase as gate length become small, why?

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filtershaoyong

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According to Sze's book, the vth0 will decrease as gate length become small with constant width.
But I conclude from TSMC 0.18um technology that Vth0 increase with length reducing.

I found that ,W=10um L=10u, 4u, 1u, 0.18u , we got the corresponding Vth0=0.43mv, 0.44mv, 0.48mv, 0.51mv

why?
 

There is an effect called:

reverse short channel effect. This effect is an increase in threshold voltage as channel length decreases.

This effect is related to the use of ion-implantation. Ion implantation causes some defects near the source which result in high doping ( unintentionaly high ) near the source, thus increasing the threshold voltage.
 

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