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DRC errors after dummy metal fill

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amitga

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Hi guys,

I run assura DRC on my design's layout and got coverage errors.
after that I wrote a script for dummy metal fill. This solved the coverage issues but now I'm getting the following errors:

DAA distance from real AA to dummy AA, min 1.20 (DAA.D.1)
DAA distance from real GC to dummy AA, min 1.20 (DAA.D.2)
DAA distance from real WN to dummy AA, min 0.6 (DAA.D.3)
DAA enclosure of WN to dummy AA, min 0.6 (DAA.E.1)
DAA extension of dummy AA beyond WN, not allowed (DAA.N.1)

It seems like I have problem with the AA .
Can someone please advise how to avoid these failures?

This is the rfs file - dummy fill script:


Code PHP (brief) - [expand]
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avParameters(
?cellName "top"
?viewName "layout"
?inputLayout ( "gds2" "YOUR_GDS2_FILE" )
?workingDirectory "."
?rulesFile "/tools/kits/tower/ts18sl/HOTCODE/techs/ts18sl/assura/t.00_00_01_scr/DUMMYFILL_TS18SL_ASSURA"
?runName "_topdummy"
?ignoreMissingOutLayer t
?time t
?set "OA"
?errorOnMissingMaster nil
?dbuPerUU 1000
?userUnits "micron"
?overwrite t
?avrpt t
?outputErrorLib t
?set "6LM"
?set "AA_gen"
?set "GC_gen"
;
); end avParameters
outFile( "gds2" "output_assura" "top_dummy.gds" backward
;============================
;; Output Dummy Layers .
;;============================
;; These Layers will be output to gds
outLayer( gcfill 8 type(8) )
outLayer( AAfill 9 type(8) )
outLayer( M3fill 44 type(8) )
outLayer( M4fill 46 type(8) )
outLayer( M5fill 48 type(8) )
outLayer( MTfill 50 type(8) )




Thanks!
 
Last edited by a moderator:

Any PDK you are working, will be given a reference manual called DRM, from the foundry itself about all the possible DRC errors. please go through it once before you start working on the cadence tool. In order to search a particular error in that DRM, you will be given a particular error number when you run the ASSURA (as you have mentioned in the brackets like (DAA.D.1)). using which you can probably clear the error.
As you said, AA is not the problem. i think in your PDK its a keyword for "Active Area" but i am not sure about this because in different PDK's we will have different notations.
 

I don't know how you are building the "keepout" for the
fills but perhaps you need to do this after up-sizing the
various layers to include these groundrule spacings, not
use the plain polygons' extents.
 

Is there a dummy fill rules in your PDK?

As for your errors, it certainly appears you didn't generate dummy AA properly. Dummy AA likely has different spacing requirements than drawn AA.
 

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