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How to create abrupt doping profile in MOSFET using Athena Silvaco

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shekharyadav

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hello
I am trying to create DG MOSFET for academic project, using silvaco Athena with reference to following paper
https://www.sciencedirect.com/science/article/pii/S003811010400125X

in order to create lower/ bottom gate below channel region an abrupt junction is to be created (gate to substrate)
I have tried lot but couldn't get an abrupt p/N+ junction
How to create such doping profile
please help
any document/ book/ link for help in Athena the user manual is not helping much
 

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