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Thank you, sergio mariotti.
I not fully understand the principle in your description. Could you give me a reference book or paper name?
This will be an interesting experiment. How about I make a CPW on the wafer, then measure the spar, and use ADS to simulate with the same dimension?
I want to calibrate a CPW on a silicon cantilever to get the S-parameters? Because of the fragile structure, can anyone recommend a good procedure to implement the calibration using VNA and probe station? I prfer to TRL method.
Any good link of similar examples is also highly appreciated.
microwave engineering passive circuits
Pozar's book is truly a Bible in microwave engineering.
But another one from Dr. Collin "Foundations for Microwave Engineering" is alos very classical, if it is not more than Pozar's.
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