cmos process steps

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cmos process steps

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rajesh13

Joined: 07 Jul 2004
Posts: 126
Location: Milky Way

02 Aug 2004 10:15 cmos process steps

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

Hughes

Joined: 10 Jun 2003
Posts: 715
Helped: 85

02 Aug 2004 10:34 cmos process steps

Search in google:
cmos process flow filetype:pdf
You will get a lot. Here is one of the results:
http://www.ntu.edu.sg/eee/eee6/LectureNotes/E425/Notes/Flow.PDF

rajesh13

Joined: 07 Jul 2004
Posts: 126
Location: Milky Way

02 Aug 2004 10:45 Re: cmos process steps

Thanks,

well this does not gives STI process details.

hoangthanhtung

Joined: 23 Apr 2004
Posts: 173
Helped: 2

02 Aug 2004 11:06 Re: cmos process steps

rajesh13 wrote:

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

More document ....................................

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rajesh13

Joined: 07 Jul 2004
Posts: 126
Location: Milky Way

06 Aug 2004 7:09 Re: cmos process steps

More document ....................................[/quote]

I think the file is not mirrored yet.

sunking

Joined: 25 May 2004
Posts: 914
Helped: 46

09 Aug 2004 2:18 Re: cmos process steps

http://www.edaboard.com/viewtopic.php?t=81220&highlight=cmos+analog+circuit+design

rajesh13

Joined: 07 Jul 2004
Posts: 126
Location: Milky Way

09 Aug 2004 7:31 Re: cmos process steps

hoangthanhtung wrote:

rajesh13 wrote:

Can some body help me in explaining the diffrent processing steps in a typical cmos process, (it will be good if some body can send me a link, where I can find varoius cross section of MOS step by step).

More document ....................................

This document gives a very surfacial information (does not tell about STI, LDD, channel implants etc)

Colbhaidh

Joined: 10 Aug 2004
Posts: 151
Helped: 16

10 Aug 2004 14:59 Re: cmos process steps

Try this. I only generated up to where the dielectrics would be placed for contacts and metals as this should be pretty much generic. Could not be bothered drawing nay more ......
Explains STI and LDD formation I think.

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