Does anyone know the symbol Er(SiO2) of 130nm proccess?

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dtzounakos

Joined: 16 Mar 2007
Posts: 36

02 Nov 2009 15:17 Does anyone know the symbol Er(SiO2) of 130nm proccess?

I go to Print>Model Parameters and window model parameter comes up. Does anyone knows exactly which symblo refers to Er (SiO2)?

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oermens

Joined: 19 Nov 2005
Posts: 331
Helped: 37
Location: canada

02 Nov 2009 16:22 Does anyone know the symbol Er(SiO2) of 130nm proccess?

3.9

http://www.google.ca/search?q=relative+permittivity+of+sio2&ie=utf-8&oe=utf-8&aq=t&rls=org.mozilla:en-US:official&client=firefox-a

dtzounakos

Joined: 16 Mar 2007
Posts: 36

02 Nov 2009 16:23 Re: Does anyone know the symbol Er(SiO2) of 130nm proccess?

some papers say 3.9 --> 4.5!

dick_freebird

Joined: 04 Mar 2008
Posts: 312
Helped: 45
Location: USA

02 Nov 2009 21:48 Does anyone know the symbol Er(SiO2) of 130nm proccess?

Er is the relative permittivity. In the model card, this can end
up being a "fudge factor" that is only loosely related to the
material system.

You often see cases where the "optical" Tox and the
"electrical" Tox have diverged. Things like the density
of the grown oxide (if it is in fact even a simple oxide
and not some combination of nitride, hydrogen-loaded
oxide, high-K or whatever) affect the electrical qualities
of the oxide.