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Which software is best for ICP ion source design and sim?
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steve_rb



Joined: 17 Feb 2004
Posts: 64
Post29 Sep 2009 8:22   

Which software is best for ICP ion source design and sim?
I am trying to design an Inductively Coupled Plasma Ion Source and do it's 3D simulation. Which software is the best for this perpose?

CST, HFSS , ... ?
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steve_rb



Joined: 17 Feb 2004
Posts: 64
Post30 Sep 2009 8:15   

Re: Which software is best for ICP ion source design and sim
Lets make it a bit more clear. First I need to do induction coil simulation. I have a photo of the coil here:

http://www.edaboard.com/ftopic364992.html

Which software do you recommend for simulation of this coil when a RF power is connected to it? CST, HFSS, Maxwell 3D, ... ?

Coil will be energised with a 13.56 MHZ 5KW RF generator and will Ionize H2 to creat plasma. I want to see how plasma behaves. Later I will add electrods for positive ion exctraction which also will need simulation software (probably the same software) for designing electrod geometry.
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Post30 Sep 2009 8:15   

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steve_rb



Joined: 17 Feb 2004
Posts: 64
Post18 Oct 2009 5:37   

Re: Which software is best for ICP ion source design and sim
After a lot of search I found the only software capable of doing ICP simulation is Pasmator from Kinema. They used to give away free demo but I missed it. Anyone has this demo or knows where to find this software please let me know. It seems it is discountinued.

Crying or Very sad

Last edited by steve_rb on 20 Oct 2009 12:26; edited 1 time in total
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dee25pak



Joined: 18 Jun 2008
Posts: 30
Post20 Oct 2009 10:46   

Re: Which software is best for ICP ion source design and sim
how have you designed your coil. kindly tell me how the modelling and design of this type of coil is done in HFSS and CST.
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steve_rb



Joined: 17 Feb 2004
Posts: 64
Post20 Oct 2009 12:28   

Re: Which software is best for ICP ion source design and sim
I am after plasma simulation and HFSS and CST can not do this kind of simulation. Only Plasmator can do it. But coil can be designed using CST and HFSS I think (I haven't done it though).
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