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smihaan
Joined: 04 Jul 2008
Posts: 4
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 30 Dec 2008 13:21 OPC for dummy |
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| Why dummy metals dont require OPC?
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Google
AdSense
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30 Dec 2008 13:21 Ads |
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fasto2008
Joined: 24 May 2008
Posts: 44
Location: TUNISIA
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30 Dec 2008 18:48 Re: OPC for dummy |
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| what do you mean by OPC
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smihaan
Joined: 04 Jul 2008
Posts: 4
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31 Dec 2008 7:13 Re: OPC for dummy |
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| Optical Proximity Correction
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erikl
Joined: 09 Sep 2008
Posts: 735
Helped: 138
Location: Germany
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31 Dec 2008 18:31 Re: OPC for dummy |
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| smihaan wrote: |
| Why dummy metals dont require OPC? |
Because they're only dummies, and their only purpose is to get the layer coverage to the required level (necessary to guarantee a good yield at the concerned technological work step). Hence no accuracy for the dummies' shapes is required, and this saves CPU time for OPC dataBase calculation.
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cheenu2002
Joined: 17 Mar 2009
Posts: 1
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30 Mar 2009 13:00 Re: OPC for dummy |
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| I normally hear that OPC checks are important for deep submicron technologies. But I couldnt get much info on how OPC correction is done and its significance. Can anyone explain it?
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erikl
Joined: 09 Sep 2008
Posts: 735
Helped: 138
Location: Germany
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climber73
Joined: 03 Sep 2007
Posts: 17
Helped: 2
Location: Europe
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01 Apr 2009 13:58 Re: OPC for dummy |
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OPC is a photolithography enhancement technique commonly used to compensate immage errors. OPC increase the fidelity of pattern transfer to the wafer.
Usually in technology used by me, you have the possibility to generate dummy with or without OPC.
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