what's the difference of mim and mom cap?

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didibabawu

Joined: 21 Dec 2005
Posts: 81
Helped: 2

26 Nov 2008 9:45 mom cap

Can anyone give me some information? Thank you!

varma_cs012

Joined: 22 Jan 2008
Posts: 87
Helped: 7
Location: Hyderabad

27 Nov 2008 11:16 momcap

MIM means...Metal Insulator Metal Cap...
MOM means...Metal Oxide Metal Cap....

rampat

Joined: 27 Jun 2007
Posts: 83
Helped: 1
Location: bangalore

28 Nov 2008 18:00 mim mom

At which context MOM caps are used..?

forkschgrad

Joined: 06 Apr 2007
Posts: 287
Helped: 8
Location: Philippines

29 Nov 2008 9:57 mom mim

are'nt they the same?

leo_o2

Joined: 03 Sep 2004
Posts: 395
Helped: 24

02 Dec 2008 9:37 mom mim capacitor

varma_cs012 had right answer. MIM need extra mask and photo-steps. MOM don't need and the unit capacitance is smaller than MIM usually. As a result, bigger area is needed for MOM.

forkschgrad

Joined: 06 Apr 2007
Posts: 287
Helped: 8
Location: Philippines

02 Dec 2008 14:05 mim mom capacitor

what are the applications of these caps? tnx.

timof

Joined: 21 Feb 2008
Posts: 86
Helped: 6

09 Dec 2008 9:09 mom caps

didibabawu wrote:

Can anyone give me some information? Thank you!

MIM (metal-insulator-metal) capacitor is a parallel-plate capacitor formed by two planes of metal separated by a very thin (usually high K) dielectric.

MOM (metal-oxide-metal, or VPP - vertical parallel-plate, or VNC - vertical natural capacitor) is an inter-digitated multi-finger capacitor formed by multiple metal layers (optionally connected by vias) in the vertical BEOL (back-end-of-line) stack separated by inter-metal dielectrics.

rubink

Joined: 15 Jan 2002
Posts: 64

09 Dec 2008 20:57 what is momcap

For deep sub micron (<100nm) with narrow minimum horizontal spacing between metals the interdigitated MOM style caps can be as area efficient as MIM caps but don't need extra process steps.

deepak242003

Joined: 24 Dec 2008
Posts: 206
Helped: 10

03 Aug 2009 5:38 mom and mim

mim is made using top two metals..... and high K dielectric MIM layer between them....
while MOM is made between other metals and normal dielectirc..

of course in addition to informaiton by timof

standup

Joined: 25 Oct 2006
Posts: 32
Helped: 2

29 Oct 2009 17:33 what's the difference of mim and mom cap?

I'm confused whether MOM cap is fabricated in one metal layer with the interdigitation style or two metal layer with the interdigitation style?
I can't understand with timof's "via connection".
Thank you for your attention

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dick_freebird

Joined: 04 Mar 2008
Posts: 313
Helped: 46
Location: USA

29 Oct 2009 18:43 what's the difference of mim and mom cap?

MOM is oxide. Could be grown aluminum oxide, could
be deposited glass.

MIM could be, but does not have to be, oxide. I have
seen nitride on molybdenum for example (a very nice,
robust, good-matching system but who the hell really
wants molybdenum interconnect anymore, or does it?).

Regardless, what your foundry makes is what you get,
and you just get to live with it.

timof

Joined: 21 Feb 2008
Posts: 86
Helped: 6

30 Oct 2009 6:16 Re: what's the difference of mim and mom cap?

standup wrote:

Usually MOM capacitors are fabricated using multiple metal layers (to have higher capacitance density, i.e. capacitance per unit area). See attached picture with a schematic drawing.

"MOM" stands for "metal-oxide-metal", but MOM capacitors are using whatever is available in the BEOL (back end of line) stack as a dielectric - for example, in modern technologies, the dielectric is a complicated stack of thin high-K (i.e. SiN) and thick low-K dielectrics.

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