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z_ghadiani
Joined: 12 May 2008
Posts: 14
Helped: 2
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 26 May 2008 8:21 Lithography |
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Dear,
Can any one introduce a book, site or article that devotes to lithography methods specially e-beam lithography?
Any explanation in the topic would be appreciated?
Thanks
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kokabanga
Joined: 02 May 2005
Posts: 45
Helped: 4
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| 30 Jul 2008 12:46 Re: Lithography |
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| z_ghadiani wrote: |
Dear,
Can any one introduce a book, site or article that devotes to lithography methods specially e-beam lithography?
Any explanation in the topic would be appreciated?
Thanks |
Hi,
Did you try
hxxp://en.wikipedia.org/wiki/Electron_beam_lithography
If I have helped you please click the "helped me" button and help me.
Thank you,
All the best
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Aircraft Maniac
Joined: 18 May 2002
Posts: 363
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| 20 Aug 2008 19:43 Lithography |
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One good book on device fabrication is:
The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell.
A copy is floating on the net here /there.
Btw what exactly do you want to know about e-beam lithography?
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