Fractional-N
Joined: 15 Oct 2007
Posts: 56
Helped: 1
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 25 Apr 2008 22:22 about LIGA??? |
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---I didn't know where to post this topic, so I placed it here!!!
Anyone know a good article or book that explains LIGA process
I searched the internet but I found nothing much useful!
for example I found this site:
http://www.fzk.de/fzk/idcplg?IdcService=FZK&node=0329&lang=en
it has a short description of process which is not useful for me
I found this article too, it is the very first article to introduce LIGA can anyone upload it for me??
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Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
Source Microelectronic Engineering archive
Volume 4 , Issue 1 (May 1986) table of contents
Pages: 35 - 56
Year of Publication: 1986
ISSN:0167-9317
Authors
E W Becker
W Ehrfield
P Hagmann
A Maner
D Münchmeyer
Publisher
Elsevier Science Ltd. Oxford, UK, UK
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