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020170
Joined: 31 Jan 2005
Posts: 238
Helped: 2
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 17 May 2007 7:50 what does it mean "FG layer" ? |
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I know ploy layer is used to form poly silicon gate.
But poly layer defines not only poly gate, and but also "FG".
what does it mean "FG" ?
I want to hear explanation from process engineer in detail.
thanks
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aicder
Joined: 13 Jan 2005
Posts: 18
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20 May 2007 7:50 what does it mean "FG layer" ? |
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| FG stand for "Floating gate", it was used in EEPROM or flash memory cell.
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iclayout1001
Joined: 16 Apr 2007
Posts: 9
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17 Jun 2007 17:34 Re: what does it mean "FG layer" ? |
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Is this "Floating gate" poly manufactured in the same way as the other poly layer?
Can this floating gate stand as high voltage as the control gate in flash?
I found in some nvm processes, the gate poly for 5V transistors is this floating gate poly layer, while in some others it's same as the control gate poly layer.
Which one is better?
| aicder wrote: |
| FG stand for "Floating gate", it was used in EEPROM or flash memory cell. |
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aicder
Joined: 13 Jan 2005
Posts: 18
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01 Aug 2007 5:48 what does it mean "FG layer" ? |
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the FG poly is the same as the other poly. so, it can be used as HV gate.
the poly layer used as the gate of 5V transistor is process owner's choice. it is depend on the oxide thickness under the poly.
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Sadegh.j
Joined: 29 Nov 2006
Posts: 803
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02 Aug 2007 11:41 Re: what does it mean "FG layer" ? |
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check
http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TWK-40SFH16-4&_user=1400009&_coverDate=06%2F30%2F2000&_rdoc=1&_fmt=&_orig=search&_sort=d&view=c&_acct=C000052577&_version=1&_urlVersion=0&_userid=1400009&md5=e5540bc4036bbd9a5e642694510d1964
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